Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials.
This fabrication technology has been syste.
- First published
- 2015
- Publishers
- Springer Berlin / Heidelberg
- Language
- English
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