Physics of Radiofrequency Capacitive Discharge

Physics of Radiofrequency Capacitive Discharge

5/5

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail.

The main properties and characteristics of RFCD, the features of electr.

First published
2018
Publishers
Taylor & Francis Group
Language
English

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